March 13, 2019: UVT Has Been Appointed Western Regional Technical Representative for CCR Technology. Read more below and In the CCR Product Pages.
CCR Technology of Troisdorf, Germany is the inventor and developer of RF-ICP-Plasma source products for more than two decades. It's proprietary COPRA Plasma Technology is based upon an inductively coupled 13.56 MHz plasma excitation. COPRA (Controlled Plasma Reactor) Technology has broad application in a wide variety of vacuum processes, examples such as:
- Activation & Cleaning of Surfaces
- DLC via direct PECVD
- Plasma Enhanced CVD
- PVD Assist in Ion Bean Assisted Deposition & Electron Beam Deposition