Magnetron Cathodes | Ion Sources | Reactive Process Control
Vacuum Quality Analyzer
Gencoa is a customer-focused company providing expert solutions for the vacuum coating sector throughout the world. For more than twenty years, Gencoa has been perfecting its range of magnetron and plasma deposition components, in addition to the introduction of process control and sensing products. In 2016, the company moved into its new purpose-built production and R&D facility in order to drive it's business expansion and bring new innovations to the market.
Download the NEW Gencoa brochure:
OPTIX VACUUM ANALYZER
The OPTIX Vacuum Analyzer is an essential tool for anyone conducting ALD or PVD and looking for a cost effective alternative to a differentially pumped RGA. OPTIX employs its own proprietary plasma generator in conjunction with an optical emission analyzer and software, that enables the user to monitor background gases in both plasma and non-plasma vacuum processes. OPTIX couples to the load lock or process chamber via a KF25 flange and utilizes the process tool's vacuum. It will operate at pressures from 750 mTorr to below 1e-6 Torr. Contact us to arrange a demonstration in Northern California, Nevada, Oregon, Washington or Idaho.
Download the OPTIX data sheet
3G Circular Magnetron Sputter Sources
Gencoa designed and manufactures the 3G (Third Generation) Circular Cathodes for applications that require a cost-effective / yet technically innovative solution in small diameter sputter sources. The family of 3G Circular Magnetrons are available in 2, 3, 4 and 5 inch target diameters and feature:
- Smallest Footprint
- +/- 45 degree tilt angle adjustment (1 degree accuracy)
- Internal gas injection as a standard feature
- Rear utility box for RF and HIPIMS applications
- Target thickness from 1 to 6 mm
- Simple target change
- High strength magnetics for sputtering of magnetic materials
- Pre-configured for direct or indirect cooling
- Numerous options available
Download the informative 3G product presentation and 3G data sheet
Contact us to discuss the specifics of your application or to schedule a product demonstration.