The COPRA DN series consists of seven standard round source models, ideally designed for Research and Development use in the field of Plasma Surface Science. High plasma densities in combination with dissociation degrees of up to 90% enable accurate surface cleaning, activation and etching as also post oxidation/nitridation of PVD processes. Those sources are also enabling basic PECVD processes on small substrate sizes. The results achieved by the COPRA DN160CF sources are typically transferable on larger substrate dimensions by using the COPRA plasma sources for larger substrate sizes.
The COPRA Linear Source series consists of six standard models, designed for PVD-Assisted DLC coating, fast substrate cleaning and activation processes. Examples of application include Sputter Assist solutions for precision optical coating, reactive sputter for increasing film densification and better stoichiometry.
The COPRA Ring Sources are applied to for large area high rate PECVD Processes as SiN, SiO, TiO, Al2O3, and DLC. COPRA Ring Sources have been used in production scale processing for more than ten years.
For static PECVD processes these RS-Sources are suitable for substrate sizes up to Generation 4.5 and in dynamic processes they are used for substrate widths in excess of 3 meters.
The patented COPRA Matchbox is anytime an integrated part of the COPRA Source. Ring sources can ce customized to fit the user’s unique requirement.
The COPRA Built-In sources have been designed for Plasma ion-assisted deposition (PIAD) in PVD applications at low temperatures in order to achieve higher atomic or molecular packing density in the thin-film layers (increasing index of refraction), minimizing wavelength shift, achieving greater adhesion and lower absorption levels. They are available in five standard model diameters. Those performance requirements are particularly crucial in the production of –
AR and hard coatings, reflector layer coatings
Dichroic color filters/Beam splitters/Reflector coatings, band pass filters
Filter and mirror technologies for controlled heat and lightning conditions
Laser optics and mirror coatings, camera lens coatings
These sources provide energy ranges required to assist the typical evaporating materials and cover a wide range of dome and planetary diameters. This family of COPRA source are easy to install and require little in the way of ongoing maintenance.
Contact us with your specific application requirements. We'll be glad to provide you with a thorough review and recommendation.